Perspectives on C-MEMS and C-NEMS biotech applications

Carbon microelectromechanical system (C-MEMS) and carbon nanoelectromechanical (C-NEMS) have been identified as promising technologies for a range of biotech applications, including electrochemical biosensors, biofuel cells, neural probes, dielectrophoretic cell trapping. Research teams around the world devoted more time to this field. After almost two decades efforts on developing C-MEMS C-NEMS, review relevant progress addressing future research opportunities critical issues is in order. This first introduces C-NEMS fabrication processes that fall into categories: photolithography- non-photolithography- based techniques. Next, detailed discussion state art, technical challenges associated with devices used applications are presented. These discussed sub-sections intracorporeal probe, dielectrophoresis trapping, culture. The concludes an exposition perspectives C-NEMS.